SEMES CO., LTD.
Patent Owner
Stats
- 125 US PATENTS IN FORCE
- 47 US APPLICATIONS PENDING
- Mar 20, 2018 most recent publication
Details
- 125 Issued Patents
- 0 Issued in last 3 years
- 0 Published in last 3 years
- 4,048 Total Citation Count
- Aug 25, 1998 Earliest Filing
- 65 Expired/Abandoned/Withdrawn Patents
Patent Activity in the Last 10 Years
Technologies
Intl Class
Technology
Matters
Rank in Class
Top Patents (by citation)
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Recent Publications
Publication #
Title
Filing Date
Pub Date
Intl Class
2018/0056,810 CONTACTLESS DRIVING MODULE AND TRANSFER APPARATUS HAVING THE SAMEAug 29, 17Mar 01, 18[B61B, B60L]
2017/0372,926 SUBSTRATE TREATING UNIT, BAKING APPARATUS INCLUDING THE SAME, AND SUBSTRATE TREATING METHOD USING BAKING APPARATUSJun 20, 17Dec 28, 17[H01L]
2017/0358,427 PLASMA ANTENNA AND APPARATUS FOR GENERATING PLASMA HAVING THE SAMEAug 29, 17Dec 14, 17[H01J]
Recent Patents
Patent #
Title
Filing Date
Issue Date
Intl Class
9915261 Substrate treating apparatus, drive assembly, and drive member controlling methodOct 30, 14Mar 13, 18[H01L, F04B, F16D]
9909197 Supporting unit and substrate treating apparatus including the sameDec 18, 15Mar 06, 18[H01J, H01L, H02N, B23K, C22C, B32B]
9715996 Adjustable capacitor, plasma impedance matching device, plasma impedance matching method, and substrate treating apparatusDec 27, 11Jul 25, 17[H01J, H05H, H01G]
9691638 Apparatus for treating substrate and method for discharging supercritical fluidJun 29, 12Jun 27, 17[H01L, F26B]
Expired/Abandoned/Withdrawn Patents
Patent #
Title
Status
Filing Date
Issue/Pub Date
Intl Class
2015/0155,188 SUBSTRATE TREATING APPARATUS AND METHODAbandonedDec 01, 14Jun 04, 15[H01J, H01L, B08B, F26B]
2015/0059,808 APPARATUS FOR PROCESSING SUBSTRATE AND METHOD OF CLEANING SAMEAbandonedAug 29, 14Mar 05, 15[B08B]
2014/0144,584 PLASMA ANTENNA AND APPARATUS FOR GENERATING PLASMA HAVING THE SAMEAbandonedNov 27, 13May 29, 14[H01J]
2013/0319,484 SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHODAbandonedMay 31, 13Dec 05, 13[H01L]
2013/0105,082 SUBSTRATE PROCESSING DEVICE AND IMPEDANCE MATCHING METHODAbandonedOct 31, 12May 02, 13[H05H, C23F]
2013/0084,404 APPARATUSES AND METHODS FOR TREATING SUBSTRATEAbandonedSep 07, 12Apr 04, 13[B05C, B05D]
2013/0003,249 ELECTROSTATIC CHUCKS, SUBSTRATE TREATING APPARATUSES INCLUDING THE SAME, AND SUBSTRATE TREATING METHODSAbandonedJun 27, 12Jan 03, 13[H01L]
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